Category Archives: Download

LAM 810-810202-013 | VIOP Phase III Extended I/O VME PCBA New Surplus TCP9400 300mm Etch OEM Spare

Product Core Brief Model: 810-810202-013 (VIOP Phase III Extended Voltage Input Output Processor, Revision 013, enhanced multi-channel expansion variant) Brand: LAM Research Series: 6U VMEbus Unified Motion & Analog I/O Master PCBA for TCP9400 300mm plasma etch cluster platforms Core Function: Centralized multi-subsystem signal processing for wafer transfer robot axes, chamber ESC indexer, thermal RTD…

LAM 810-099175-012 | VIOP Phase III VME Motion & Analog I/O PCBA New Surplus TCP9400 300mm Etch OEM Spare

Product Core Brief Model: 810-099175-012 (VIOP Phase III / Voltage Input Output Processor, Revision 012, predecessor to Rev 312 variant) Brand: LAM Research Series: 6U VMEbus Motion & Analog I/O Master PCBA for TCP9400 300mm plasma etch cluster platforms Core Function: Unified processing of multi-axis robot encoder feedback, chamber analog sensor telemetry, and all mechanical…

LAM 810-800082-043 | VME Bus Indexer Breakout PCBA New Surplus TCP9400 300mm Etch OEM Spare

Product Core Brief Model: 810-800082-043 (Revision 043, VME Indexer Breakout Buffer PCB) Brand: LAM Research Series: VMEbus Motion Signal Breakout Module for TCP9400 300mm plasma etch cluster platforms Core Function: Act as buffered signal bridge between main VME backplane and ESC stage indexer motion hardware; distribute isolated pulse/direction motion commands, sample stage position trigger signals,…

LAM 810-225420-002 | Node Communication I/O PCBA New Surplus TCP9400 Astra 300mm Etch OEM Spare

Product Core Brief Model: 810-225420-002 (Revision 002, multi-port serial node communication PCB) Brand: LAM Research Series: Remote Subrack Signal Node PCBA for TCP9400 / Astra 300mm plasma etch processing platforms Core Function: Act as distributed serial communication hub between main VME control chassis and remote gas, thermal, RF, motion subracks; aggregate multi-channel RS232 serial telemetry…

LAM 810-234640-312 | VIOP Phase III VME Motion & Analog I/O PCBA New Surplus TCP9400 300mm Etch OEM Spare

Product Core Brief Model: 810-234640-312 (VIOP Phase III / Voltage Input Output Processor, Revision 312) Brand: LAM Research Series: 6U VMEbus Motion & Analog I/O Master PCBA for TCP9400 / Kiyo 300mm plasma etch cluster platforms Core Function: Centralized processing of multi-axis robot motion encoder feedback, chamber analog sensor telemetry, and all mechanical safety interlocks;…

LAM 810-066590-004 | 3-Axis Stepper Motion Interface Baseboard New Surplus Lam 300mm Etch OEM Spare

Product Core Brief Model: 810-066590-004 (Revision B, 3-axis stepper motion baseboard) Brand: LAM Research Series: Cluster Tool Wafer Handling Motion Control PCBA for TCP9400 300mm plasma etch platforms Core Function: Generate pulse/direction motion waveforms for three independent robot stepper axes, sample differential encoder position feedback, validate mechanical travel interlocks, and exchange motion telemetry with the…

LAM 810-082745-003 | Wafer Lift Motion Drive Control PCBA New Surplus Kiyo TCP9400 Etch OEM Spare

Product Core Brief Model: 810-082745-003 (Revision 003; dedicated lift pin motion drive PCB for Kiyo / TCP9400 300mm etch chambers) Brand: LAM Research Series: Chamber Wafer Lift Motion Control PCBA for legacy 300mm plasma etch processing platforms Core Function: Generate stepper drive waveforms for electrostatic chuck lift pin axes, sample differential encoder position feedback, enforce…

LAM 810-069751-114 | Type 41 Node Board PCBA New Surplus TCP9400 300mm Etch OEM Spare

Product Core Brief Model: 810-069751-114 (Type 41 Node Board, Revision A) Brand: LAM Research Series: Inter-Chassis Communication Node PCBA for TCP9400 300mm plasma etch cluster platforms Core Function: Act as fiber-optic signal bridge between the tool main control chassis and remote extension RXM subracks; consolidate analog/digital sensor telemetry, route safety interlock traffic, and translate proprietary…

LAM 853-049542-173 | 24-Channel Chamber Temperature Control PCBA New Surplus TCP9400 12” Etch OEM Spare

Product Core Brief Model: 853-049542-173 (Revision 173, dedicated thermal control PCB for TCP9400 12-inch etch chambers) Brand: LAM Research Series: Chamber Thermal Control PCBA for TCP9400 300mm plasma etch processing platforms Core Function: Sample 24 independent RTD temperature sensor signals across chamber electrodes, execute closed-loop thermal regulation for 13.56MHz RF bias hardware, transmit calibrated temperature…

LAM 810-046015-010 | VIOP III Motion I/O VME PCBA New Surplus Lam 2300 Kiyo Etch OEM Spare

Product Core Brief Model: 810-046015-010 (VIOP III / VIOP-3, Revision 010; prior Rev 008 cross-compatible with motion register mapping differences) Brand: LAM Research Series: VMEbus Motion & Discrete I/O PCBA for Lam 2300 Flex, Kiyo, Exelan 200/300mm plasma etch cluster platforms Core Function: Synchronize multi-axis stepper motor wafer transport motion, read position encoder feedback, manage…