LAM 810-800081-022 | ESC Indexer Motion Driver VME PCBA New Surplus TCP9400 300mm Etch OEM Spare
Product Core Brief Model: 810-800081-022 (Revision 022, Indexer Motion Driver VME Main Card; paired breakout companion 810-800082-043) Brand: LAM Research Series: VMEbus ESC Wafer Stage Indexer Master Drive PCBA for TCP9400 300mm plasma etch platforms Core Function: Generate high-resolution micro-stepping pulse/direction motion waveforms for electrostatic chuck rotary index stage, output buffered motion commands to the…









