Jul62026

LAM 810-001489-016 | Rocker Valve Interface Digital I/O PCBA New Surplus ONTRAK CMP OEM Spare

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Product Core Brief Model: 810-001489-016 (Revision 016, Rocker Valve Interface PCBA; predecessor Rev 003) Brand: LAM Research (ONTRAK CMP Polisher Platform) Series: Rocker/Swing Valve Digital I/O Interface Board for ONTRAK 200/300mm CMP Chemical Mechanical Polishing tools Core Function: Act as dedicated signal bridge between tool master control logic and process rocker/swing solenoid valves; output isolated…

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Jul62026

LAM 810-801237-021 | Stepper Driver Motion Interface PCBA New Surplus Kiyo TCP9400 300mm Etch OEM Spare

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Product Core Brief Model: 810-801237-021 (Revision 021, stepper driver interface PCBA; cross compatible Rev 022 variant) Brand: LAM Research Series: Wafer Handling Robot Motion Drive Interface for Kiyo C Series / TCP9400 300mm plasma etch cluster platforms Core Function: Receive RS422 pulse/direction motion commands from VIOP III master control board, condition and amplify signals to…

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Jul62026

LAM 810-810202-013 | VIOP Phase III Extended I/O VME PCBA New Surplus TCP9400 300mm Etch OEM Spare

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Product Core Brief Model: 810-810202-013 (VIOP Phase III Extended Voltage Input Output Processor, Revision 013, enhanced multi-channel expansion variant) Brand: LAM Research Series: 6U VMEbus Unified Motion & Analog I/O Master PCBA for TCP9400 300mm plasma etch cluster platforms Core Function: Centralized multi-subsystem signal processing for wafer transfer robot axes, chamber ESC indexer, thermal RTD…

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Jul62026

LAM 810-099175-012 | VIOP Phase III VME Motion & Analog I/O PCBA New Surplus TCP9400 300mm Etch OEM Spare

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Product Core Brief Model: 810-099175-012 (VIOP Phase III / Voltage Input Output Processor, Revision 012, predecessor to Rev 312 variant) Brand: LAM Research Series: 6U VMEbus Motion & Analog I/O Master PCBA for TCP9400 300mm plasma etch cluster platforms Core Function: Unified processing of multi-axis robot encoder feedback, chamber analog sensor telemetry, and all mechanical…

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Jul62026

LAM 810-800081-022 | ESC Indexer Motion Driver VME PCBA New Surplus TCP9400 300mm Etch OEM Spare

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Product Core Brief Model: 810-800081-022 (Revision 022, Indexer Motion Driver VME Main Card; paired breakout companion 810-800082-043) Brand: LAM Research Series: VMEbus ESC Wafer Stage Indexer Master Drive PCBA for TCP9400 300mm plasma etch platforms Core Function: Generate high-resolution micro-stepping pulse/direction motion waveforms for electrostatic chuck rotary index stage, output buffered motion commands to the…

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Jul62026

LAM 810-800082-043 | VME Bus Indexer Breakout PCBA New Surplus TCP9400 300mm Etch OEM Spare

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Product Core Brief Model: 810-800082-043 (Revision 043, VME Indexer Breakout Buffer PCB) Brand: LAM Research Series: VMEbus Motion Signal Breakout Module for TCP9400 300mm plasma etch cluster platforms Core Function: Act as buffered signal bridge between main VME backplane and ESC stage indexer motion hardware; distribute isolated pulse/direction motion commands, sample stage position trigger signals,…

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Jul62026

LAM 810-225420-002 | Node Communication I/O PCBA New Surplus TCP9400 Astra 300mm Etch OEM Spare

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Product Core Brief Model: 810-225420-002 (Revision 002, multi-port serial node communication PCB) Brand: LAM Research Series: Remote Subrack Signal Node PCBA for TCP9400 / Astra 300mm plasma etch processing platforms Core Function: Act as distributed serial communication hub between main VME control chassis and remote gas, thermal, RF, motion subracks; aggregate multi-channel RS232 serial telemetry…

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Jul62026

LAM 810-234640-312 | VIOP Phase III VME Motion & Analog I/O PCBA New Surplus TCP9400 300mm Etch OEM Spare

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Product Core Brief Model: 810-234640-312 (VIOP Phase III / Voltage Input Output Processor, Revision 312) Brand: LAM Research Series: 6U VMEbus Motion & Analog I/O Master PCBA for TCP9400 / Kiyo 300mm plasma etch cluster platforms Core Function: Centralized processing of multi-axis robot motion encoder feedback, chamber analog sensor telemetry, and all mechanical safety interlocks;…

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Jul62026

LAM 810-066590-004 | 3-Axis Stepper Motion Interface Baseboard New Surplus Lam 300mm Etch OEM Spare

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Product Core Brief Model: 810-066590-004 (Revision B, 3-axis stepper motion baseboard) Brand: LAM Research Series: Cluster Tool Wafer Handling Motion Control PCBA for TCP9400 300mm plasma etch platforms Core Function: Generate pulse/direction motion waveforms for three independent robot stepper axes, sample differential encoder position feedback, validate mechanical travel interlocks, and exchange motion telemetry with the…

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Jul62026

LAM 810-082745-003 | Wafer Lift Motion Drive Control PCBA New Surplus Kiyo TCP9400 Etch OEM Spare

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Product Core Brief Model: 810-082745-003 (Revision 003; dedicated lift pin motion drive PCB for Kiyo / TCP9400 300mm etch chambers) Brand: LAM Research Series: Chamber Wafer Lift Motion Control PCBA for legacy 300mm plasma etch processing platforms Core Function: Generate stepper drive waveforms for electrostatic chuck lift pin axes, sample differential encoder position feedback, enforce…

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