Product Core Brief

• Model: 853-049542-173 (Revision 173, dedicated thermal control PCB for TCP9400 12-inch etch chambers)
• Brand: LAM Research
• Series: Chamber Thermal Control PCBA for TCP9400 300mm plasma etch processing platforms
• Core Function: Sample 24 independent RTD temperature sensor signals across chamber electrodes, execute closed-loop thermal regulation for 13.56MHz RF bias hardware, transmit calibrated temperature telemetry to the tool master controller via internal serial bus, and trigger overheat safety interlock trips.
• Product Type: Compact enclosure-protected printed circuit board assembly with multi-terminal sensor header connectors
• Key Specs: 24 isolated RTD input channels | 13.56MHz RF noise filtering | <4ms over-temperature interlock fault response latency
• Condition: New Original (New Surplus); Discontinued OEM spare, limited factory stock reserved for active TCP9400 installed fleets.