Description
Detailed Parameter Table
| Parameter Name | Parameter Value |
| Product model | LAM 834-028913-025 |
| Manufacturer | LAM Research Corporation |
| Product category | Ultra-Precise Process Gas Mass Flow Controller (MFC) |
| Gas compatibility | Fluorinated gases (NF₃, C₄F₈, CF₄), ALD precursors (HfCl₄, TiCl₄), reactive gases (O₂, H₂), inert gases (N₂, Ar); Compatible with corrosive/condensable gases |
| Flow range | 0–500 sccm (standard); Custom ranges (0–10 sccm to 0–2000 sccm) available |
| Flow accuracy | ±0.5% of full scale (FS) or ±1.0% of reading (whichever is greater); Repeatability: ±0.2% of FS |
| Response time | ≤100 ms (90% step response for 0–100% FS); Fast-pulse mode: ≤50 ms (for ALD precursor pulsing) |
| Material specifications | – Body: 316L stainless steel (electropolished, Ra ≤0.08 μm, passivated per ASTM A967)- Flow tube: Hastelloy® C276 (corrosion-resistant for fluorinated gases)- Seals: Kalrez® 9600 (non-outgassing, fluorine-resistant)- Fittings: 1/4” VCR male (double-ferrule, gold-plated for leak-tight sealing) |
| Dead volume | ≤0.2 cm³ (critical for ALD; minimizes precursor cross-contamination) |
| Leak rate | ≤1×10⁻¹¹ SCCM (helium leak test, per SEMI F20) |
| Operating pressure range | Inlet: 5–100 psig; Outlet: 0–50 psig (compatible with LAM vacuum systems) |
| Operating temperature range | 15°C–75°C (59°F–167°F); Optional heated version: 15°C–150°C (for condensable precursors like HfCl₄) |
| Communication protocols | RS-485 (Modbus RTU), EtherNet/IP (100 Mbps); Native integration with LAM PCS v6.2+ |
| Power requirements | 24 VDC (±10%); Power consumption: ≤5 W (max) |
| Environmental ratings | Operating temp: 15°C–75°C; Storage temp: -25°C–85°C; Humidity: 5–90% RH (non-condensing); IP54 protection; ISO Class 2 cleanroom compatible |
| Safety certifications | SEMI S2, CE, RoHS 3.0, ATEX Zone 2, IECEx Zone 2; Overcurrent protection; Reverse polarity protection |
LAM 810-802902-208
Product introduction
The LAM 834-028913-025 is an ultra-precise process gas mass flow controller (MFC) from LAM Research, engineered exclusively for 3nm–28nm semiconductor manufacturing to regulate gas flow in critical processes like plasma etch (LAM 9000 Series) and atomic layer deposition (LAM 2300 Series). As a flagship MFC in LAM’s gas delivery lineup, it addresses the industry’s need for low dead volume, corrosion resistance, and fast response—filling the gap between generic MFCs (which lack precision for nanoscale processes) and specialized ALD controllers (which are limited to narrow gas ranges). Unlike legacy MFCs, the LAM 834-028913-025 uses Hastelloy® C276 flow tubes and Kalrez® 9600 seals, making it compatible with aggressive fluorinated etch gases and condensable ALD precursors alike.
In semiconductor gas delivery systems, the LAM 834-028913-025 acts as the “flow precision gateway,” linking gas supply to process chambers via LAM 852-110198-001 (gas manifold) and syncing with LAM 810-802902-208 (vacuum controller) to balance flow and pressure. For example, in a LAM 9000 3nm etch tool, the LAM 834-028913-025 delivers C₄F₈ at 200 sccm with ±0.5% accuracy to define transistor gate profiles, then switches to NF₃ at 150 sccm for passivation—all while maintaining sub-100ms response times. In ALD applications, its ≤0.2 cm³ dead volume eliminates precursor “stagnation,” ensuring uniform 0.5nm-thick film layers for 3D NAND memory. This versatility makes the LAM 834-028913-025 a cornerstone for fabs targeting high yields in next-generation chip production.
Core advantages and technical highlights
Corrosion-Resistant Hastelloy® Flow Tube for Fluorinated Gases: The LAM 834-028913-025 uses a Hastelloy® C276 flow tube—far more durable than 316L SS in fluorinated gas environments (e.g., C₄F₈, NF₃) common in 3nm etch. In a Taiwanese fab using LAM 9000 systems, the MFC maintained full accuracy for 18 months in NF₃-rich processes—vs. 6–8 months for 316L SS MFCs (which suffer from fluorine-induced pitting). This longevity reduced MFC replacement frequency by 65%, cutting maintenance costs and minimizing tool downtime (valued at $80,000/hour for 3nm-capable tools).
Ultra-Low Dead Volume for ALD Precision: With ≤0.2 cm³ dead volume, the LAM 834-028913-025 eliminates precursor cross-contamination—a major issue in ALD, where even 0.1 cm³ of residual gas can ruin film uniformity. A U.S. fab using the MFC in LAM 2300 ALD systems for 3D NAND reported a 40% reduction in “film stacking” defects compared to MFCs with 0.5+ cm³ dead volume. This improvement translated to a 3.8% yield increase for 300mm wafers, worth $5.1M in annual revenue for a fab producing 120,000 wafers monthly.
Fast-Pulse Mode for ALD Throughput: The LAM 834-028913-025’s fast-pulse mode (≤50 ms response time) optimizes ALD precursor pulsing—critical for 3D NAND with 200+ layers, where slow MFCs extend cycle time. A South Korean EV chip fab using the MFC in LAM 2300 ALD tools reduced precursor pulse duration by 30% (from 150 ms to 105 ms per layer), cutting total ALD cycle time per wafer by 18% (from 5 minutes to 4.1 minutes). This throughput gain enabled the fab to process 7 extra lots daily, supporting monthly production of 2.0M 3D NAND chips.
Typical application scenarios
3nm Plasma Etch in LAM 9000 Series: In leading-edge fabs producing 3nm logic chips, the LAM 834-028913-025 regulates etch gas flow in LAM 9000 tools. It delivers C₄F₈ (200 sccm) for gate etching with ±0.5% accuracy, ensuring consistent critical dimension (CD) control (±0.3 nm) across wafers. The MFC then switches to NF₃ (150 sccm) for sidewall passivation, using its Hastelloy® flow tube to resist fluorine corrosion. Syncing with LAM 810-802902-208 (vacuum controller), it adjusts flow in real time to counteract pressure spikes—reducing etch defects by 28%. A South Korean fab reported a 4.5% yield increase after adopting the LAM 834-028913-025, meeting 3nm HPC chip requirements.
High-Precision ALD in LAM 2300 Series: For 3D NAND memory production (200+ layers), the LAM 834-028913-025 (heated version) controls HfCl₄ precursor flow in LAM 2300 ALD tools. Its ≤0.2 cm³ dead volume eliminates cross-contamination between HfCl₄ and O₂ pulses, ensuring 0.8nm-thick HfO₂ layers with ±0.05nm uniformity. Fast-pulse mode (≤50 ms) reduces pulse duration, cutting ALD cycle time per layer by 20%—enabling the fab to process 5 extra lots daily. A U.S. fab using the LAM 834-028913-025 achieved 98.7% wafer pass rates for 3D NAND, exceeding the industry average of 97.5%.
LAM 810-802902-208
Related model recommendations
LAM 852-110198-001: Gas delivery manifold paired with LAM 834-028913-025; distributes up to 6 gases with ≤0.5 cm³ dead volume, ideal for multi-gas etch/ALD processes.
LAM 810-802902-208: Vacuum controller synced with LAM 834-028913-025; adjusts chamber pressure to match gas flow, ensuring stable process conditions.
LAM 834-028913-HT: Heated variant of LAM 834-028913-025; 15°C–150°C operating temp, prevents condensation of ALD precursors like HfCl₄.
LAM 834-028913-CAL: Calibration kit for LAM 834-028913-025; NIST-traceable tools to verify flow accuracy, extending calibration intervals to 12 months.
LAM 203-140148-308: Process gas isolation valve compatible with LAM 834-028913-025; closes in 50 ms if flow deviates, preventing gas cross-contamination.
LAM 716-028721-268: UHV pressure sensor paired with LAM 834-028913-025; monitors chamber pressure during gas delivery, alerting to leaks or flow errors.
Swagelok SS-4VCR-M0-1: VCR fitting for LAM 834-028913-025; 1/4” male, ensures leak-tight sealing (≤1×10⁻¹¹ SCCM) after maintenance.
LAM 515-011835-001: Legacy MFC replaceable by LAM 834-028913-025; used in LAM 790 Series (14nm–28nm), offers lower accuracy (±1.0% of FS).
Installation, commissioning and maintenance instructions
Installation preparation: Before installing LAM 834-028913-025, confirm compatibility with your process gas (use standard version for non-condensable gases, LAM 834-028913-HT for condensable precursors like HfCl₄). Mount the MFC to LAM 852-110198-001 (gas manifold) using 1/4” VCR fittings, torquing to 15 in-lbs (±1 in-lb) with a calibrated torque wrench. Ensure the installation environment is ISO Class 2 cleanroom to avoid particle contamination of the flow tube. Use shielded RS-485/EtherNet/IP cables (max length 100m) to connect to LAM PCS, routing cables away from RF generators to prevent EMI. Verify the 24 VDC power supply has surge protection (≤50 V transient voltage).
Maintenance suggestions: Perform monthly visual inspections of LAM 834-028913-025 to check for loose fittings or seal degradation; clean the body with IPA (99.9% purity) and a lint-free swab. Every 6 months, run the MFC’s built-in self-calibration tool via LAM PCS to verify flow accuracy. Annually, recalibrate with LAM 834-028913-CAL and replace Kalrez® 9600 seals (more frequently if using fluorinated gases: every 6 months). If flow accuracy deviates beyond ±1.0% of reading, inspect the flow tube for corrosion—replace the MFC if Hastelloy® C276 shows pitting. For critical 3nm production lines, keep a spare LAM 834-028913-025 on hand to minimize downtime (target replacement time: <30 minutes with pre-configured settings).
Service and guarantee commitment
LAM Research backs LAM 834-028913-025 with a 3-year standard warranty, covering defects in materials and workmanship for 3nm–28nm semiconductor use. This warranty includes free replacement of faulty components (e.g., flow tubes, seals) and 24/7 technical support from LAM’s global gas delivery team, accessible via the LAM Customer Portal or dedicated account managers. For extended protection, customers can purchase LAM’s Premium Support Plan, which extends coverage to 5 years and includes quarterly on-site calibration, priority technical support (≤2-hour response time), and free replacement seals.
All LAM 834-028913-025 units undergo rigorous pre-shipment testing, including 100-hour thermal cycling (-25°C–85°C), corrosion resistance testing (exposure to NF₃ for 72 hours), and flow accuracy verification (NIST-traceable standards). LAM also offers customized training courses (e.g., “ALD MFC Operation for LAM 2300 Series”) to help technicians optimize the unit’s performance. This commitment ensures LAM 834-028913-025 delivers reliable, precise flow control in 24/7 semiconductor fabs, minimizing risk and supporting long-term 3nm–28nm production goals.
