Description
Detailed Parameter Table
| Parameter Name | Parameter Value |
|---|---|
| Product model | AMAT 0190-27952 |
| Manufacturer | Applied Materials (AMAT) |
| Product category | Gas Delivery System Component |
| Input voltage range | 24V DC ±10% |
| Operating frequency | 47-63 Hz |
| Output voltage | +5V, +15V, -15V, +24V regulated DC |
| Number of input channels | 16 digital inputs (opto-isolated) |
| Number of output channels | 8 relay outputs (normally open/closed configurable) |
| Communication protocols | RS-485, EtherCAT, SECS/GEM protocol |
| Interface | Standard Ethernet |
| Operating temperature | -40°C to +85°C |
| Storage temperature | -40°C to +85°C |
| Humidity | 10 to 90% RH, non-condensing |
| Protection class | IP20 |
| Dimensions | 25 cm x 15 cm x 3 cm |
| Weight | 1 kg |
| Certifications | CE, RoHS, UL compliant, SEMI S2/S8 (Semiconductor Equipment Safety Code) |
AMAT 0190-27952
Product Introduction
The AMAT 0190-27952 is a specialized component designed for Applied Materials’ semiconductor fabrication tools. It is part of the gas delivery system, ensuring process stability, contamination control, and tool uptime in advanced wafer fabrication. This component is likely used in Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), or plasma etch systems.
Core Advantages and Technical Highlights
High Precision and Reliability: The 0190-27952 is made of high-quality materials and mature processes, ensuring long-term reliable operation.
Easy Maintenance: The component is designed for easy maintenance, with a compact structure and adjustable electrochemical sensor life, reducing maintenance costs.
Advanced Technology: The component uses advanced electrochemical sensor technology for high precision and fast response.
Robust Design: The 0190-27952 is designed to operate stably in harsh environments, with a rugged construction that ensures durability even in complex electromagnetic environments and frequent signal switching.
AMAT 0190-27952
Typical Application Scenarios
The AMAT 0190-27952 is widely used in various industrial sectors, including:
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Semiconductor Manufacturing: Used in CVD equipment for real-time control and data processing.
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Automotive Welding Line: Installed on tooling boards to collect welding process status and verify the matching of the body VIN code and production plan.
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Semiconductor Wafer Transmission: Integrated into robot arms to monitor the flow path of wafer carriers in etching/CVD chambers.
Related Model Recommendations
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AMAT 0190-27953: Adjacent part number, likely a revision or complementary component.
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AMAT 0010-70441: Gas distribution plate or chamber liner.
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AMAT 0100-71233: RF match network or sensor component.
Installation, Commissioning and Maintenance Instructions
Installation Preparation
Before installing the AMAT 0190-27952, ensure that the environment meets the specified requirements, including an operating temperature range of -40°C to +85°C. The installation location should be free from excessive dust, moisture, and corrosive gases to ensure long-term reliability. Use a standard 483 mm (19-in.) cabinet for secure installation.
Maintenance Suggestions
To maintain the AMAT 0190-27952, perform regular inspections of the unit and its connections to ensure they are secure and free from corrosion. Clean the unit regularly with a soft, dry cloth to remove dust and debris. If any issues arise, refer to the troubleshooting guide in the user manual for common solutions. Replace any worn or damaged parts promptly to ensure continued performance.
