Description
Detailed Parameter Table
Parameter Name | Parameter Value |
---|---|
Product model | AMAT 0190-07970 |
Manufacturer | Applied Materials (AMAT) |
Product category | Interlock Module |
Input voltage range | 24V DC ±10% |
Operating frequency | 47-63 Hz |
Output voltage | +5V, +15V, -15V, +24V regulated DC |
Number of input channels | 16 digital inputs (opto-isolated) |
Number of output channels | 8 relay outputs (normally open/closed configurable) |
Communication protocols | RS-485, EtherCAT, SECS/GEM protocol |
Interface | Standard Ethernet |
Operating temperature | -40°C to +85°C |
Storage temperature | -40°C to +85°C |
Humidity | 10 to 90% RH, non-condensing |
Protection class | IP20 |
Dimensions | 25 cm x 15 cm x 3 cm |
Weight | 1 kg |
Certifications | CE, RoHS, UL compliant, SEMI S2/S8 (Semiconductor Equipment Safety Code) |
AMAT 0190-07970
Product Introduction
The AMAT 0190-07970 is a high-performance interlock module designed for industrial control systems. It is part of Applied Materials’ extensive lineup of automation products, known for their reliability and advanced technology. This module is used in semiconductor manufacturing processes, particularly in the Centura/Endura series machines, to ensure safe and efficient operation.
Core Advantages and Technical Highlights
Real-Time Monitoring and Control: The 0190-07970 module monitors the status of machinery, environmental parameters, and operating procedures in real-time to ensure that critical modules such as process chambers and transfer manipulators operate under safe conditions.
Fast Response Time: The module features a logic processing unit based on FPGA or microcontroller, with a response time of ≤10ms, ensuring quick reaction to abnormal signals.
Robust Design: The module is designed to operate stably in harsh environments, with a rugged construction that ensures durability even in complex electromagnetic environments and frequent signal switching.
Advanced Communication: The module supports multiple communication protocols, including RS-485, EtherCAT, and SECS/GEM, facilitating seamless integration with existing industrial networks.
User-Friendly Design: The rear-mounted design of the 0190-07970 allows for easy integration into standard industrial control cabinets, simplifying installation and maintenance.
AMAT 0190-07970
Typical Application Scenarios
The AMAT 0190-07970 is widely used in various industrial sectors, including:
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Semiconductor Manufacturing: Used in CVD equipment for real-time control and data processing.
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Automotive Welding Line: Installed on tooling boards to collect welding process status and verify the matching of the body VIN code and production plan.
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Semiconductor Wafer Transmission: Integrated into robot arms to monitor the flow path of wafer carriers in etching/CVD chambers.
Related Model Recommendations
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AMAT 0100-71271: A related module with similar control capabilities.
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AMAT 0100-71311: Another module suitable for similar applications.
Installation, Commissioning and Maintenance Instructions
Installation Preparation
Before installing the AMAT 0190-07970, ensure that the environment meets the specified requirements, including an operating temperature range of -40°C to +85°C. The installation location should be free from excessive dust, moisture, and corrosive gases to ensure long-term reliability. Use a standard 483 mm (19-in.) cabinet for secure installation.
Maintenance Suggestions
To maintain the AMAT 0190-07970, perform regular inspections of the unit and its connections to ensure they are secure and free from corrosion. Clean the unit regularly with a soft, dry cloth to remove dust and debris. If any issues arise, refer to the troubleshooting guide in the user manual for common solutions. Replace any worn or damaged parts promptly to ensure continued performance.