Description
Detailed Parameter Table
| Parameter Name | Parameter Value |
|---|---|
| Product model | AMAT 0100-09123 |
| Manufacturer | Applied Materials (AMAT) |
| Product category | Wafer Sensor Board |
| Description | Wafer Sensor PCB for P5000 Precision 5000 system |
| Operating Voltage | 24 VDC |
| Operating Temperature Range | -20°C to +85°C |
| Humidity Range | 5% to 95% RH (non-condensing) |
| Protection Rating | IP20 |
| Dimensions (W x H x D) | 10.5 cm x 15 cm x 5 cm |
| Weight | 1.2 kg |
| Communication | DeviceNet, RS-485 |
| Certifications | SEMI S2, SEMI F47, CE |
| Compatibility | Compatible with AMAT P5000 systems |
AMAT 0100-09123
Product Introduction
The AMAT 0100-09123 is a high-precision wafer sensor board designed for use in semiconductor manufacturing processes. It is part of the AMAT P5000 Precision 5000 system and is used to detect and monitor wafer presence and position during semiconductor manufacturing processes.
Core Advantages and Technical Highlights
High Precision:
-
Offers high accuracy in sensing and measurement, suitable for precision processes.
Durability:
-
Built to withstand harsh environments found in semiconductor fabrication facilities.
Compatibility:
-
Compatible with various Applied Materials wafer processing systems, ensuring seamless integration.
User-Friendly Design:
-
Easy to install and integrate into existing systems, reducing downtime and improving overall productivity.
AMAT 0100-09123
Typical Application Scenarios
The AMAT 0100-09123 is widely used in various semiconductor manufacturing processes:
-
Wafer Inspection: Detects and monitors wafer presence and position during inspection processes.
-
Wafer Transfer: Ensures precise control during wafer transfer operations.
-
Process Monitoring: Monitors wafer position and presence in semiconductor fabrication lines.
Related Model Recommendations
-
AMAT P5000 System: The primary system that the 0100-09123 is designed to support.
-
AMAT 0100-09123 Calibration Kit: For precise calibration of the sensor board.
Installation, Commissioning and Maintenance Instructions
Installation Preparation:
-
Ensure the environment meets the specified temperature and humidity requirements (-20°C to +85°C, 5% to 95% RH non-condensing). Use shielded cables and proper grounding to minimize electromagnetic interference.
Maintenance Suggestions:
-
Regularly inspect connections for wear and clean the module with a static-free cloth to ensure optimal heat dissipation. Perform annual full calibration and quarterly leak checks (He mass spec recommended). Replace O-rings every 2 years and verify ground connections (impedance <1Ω).
Service and Guarantee Commitment
Applied Materials stands behind the quality and reliability of the 0100-09123, offering a comprehensive warranty that covers manufacturing defects and performance issues for a specified period. Their dedicated after-sales support team is available to assist with technical inquiries and provide prompt solutions to ensure minimal disruption to your operations.
